Mechanical Enhancement of Low-k Organosilicates by Laser Spike Annealing
Volksen, Willi, Dubois, Geraud, Kellock, Andrew, Magbitang, Teddie P., Miller, Robert D., Miller, Dolores, Cohen, Stephan, Simonyi, Eva E., Ramirez, Lynher, Markle, David, Chen, Shaoyin, Zhou, SenquanVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2966222
File:
PDF, 301 KB
english, 2008