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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Amorphous Lanthanum Lutetium Oxide Thin Films as an Alternative High-k Material
Lopes, Joao M., Roeckerath, Martin, Heeg, Tassilo, Schubert, Jurgen, Littmark, Uffe, Mantl, Siegfried, Besmehn, Astrid, Myllymaki, Pia, Niinistö, Lauri, Adamo, Carolina, Schlom, Darrel G.Volume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2779570
File:
PDF, 312 KB
english, 2007