![](/img/cover-not-exists.png)
SLIDE FILM DAMPING AND SQUEEZE FILM DAMPING MODELS CONSIDERING GAS RAREFACTION EFFECTS FOR MEMS DEVICES
ONGKODJOJO, ANDOJO, TAY, FRANCIS E. H.Volume:
4
Language:
english
Journal:
International Journal of Computational Engineering Science
DOI:
10.1142/s146587630300137x
Date:
June, 2003
File:
PDF, 253 KB
english, 2003