[ECS 215th ECS Meeting - San Francisco, CA (May 24 - May 29, 2009)] ECS Transactions - Integration of Vertical Carbon Nanotube Bundles for Interconnects
Chiodarelli, Nicolo, Kellens, Kristof, Cott, Daire J., Peys, Nick, Arstila, Kai, Heyns, Marc M., De Gendt, Stefan, Groeseneken, Guido, Vereecken, Philippe M.Year:
2009
Language:
english
DOI:
10.1149/1.3246595
File:
PDF, 1.04 MB
english, 2009