[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Ge Condensation Technologies for Advanced MOSFETs on SGOI and GOI Substrates
Sugiyama, Naoharu, Tezuka, Tsutomu, Irisawa, Toshifumi, Usuda, Koji, Moriyama, Yoshihiko, Nakaharai, Shu, Hirashita, Norio, Takagi, Shin-IchiVolume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355895
File:
PDF, 513 KB
english, 2006