(Invited) Implant Free SiGe-Quantum Well: From Device...

(Invited) Implant Free SiGe-Quantum Well: From Device Concept To High-Performing pFETs

Mitard, J., Eneman, G., Hellings, G., Witters, L., Hikavyy, A., Vincent, B., Loo, R., Bender, H., Horiguchi, N., Collaert, N., Thean, A.
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Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05009.0131ecst
Date:
March, 2013
File:
PDF, 412 KB
english, 2013
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