Plasma Nitration of HfO[sub 2] Gate Dielectric in Nitrogen...

Plasma Nitration of HfO[sub 2] Gate Dielectric in Nitrogen Ambient for Improvement of TaN/HfO[sub 2]/Si Performance

Choi, Kyu-Jeong, Kim, Jeon-Ho, Yoon, Soon-Gil
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Volume:
7
Year:
2004
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.1795055
File:
PDF, 87 KB
english, 2004
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