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Effects of photoresist polymer molecular weight on line-edge roughness and its metrology probed with Monte Carlo simulations
G.P. Patsis, V. Constantoudis, E. GogolidesVolume:
75
Year:
2004
Language:
english
Pages:
12
DOI:
10.1016/j.mee.2004.06.005
File:
PDF, 564 KB
english, 2004