Reliability of multistacked tantalum-based structure as the...

Reliability of multistacked tantalum-based structure as the barrier film in ultralarge-scale integrated metallization

Keng-Liang Ou, Chi-Chang Wu, Chiung-Chi Hsu, Chin-Sung Chen, Yih-Chuen Shyng, Wen-Fa Wu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
81
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.mee.2005.03.001
File:
PDF, 339 KB
english, 2005
Conversion to is in progress
Conversion to is failed