Simulation of fluid flow in the step and flash imprint...

Microelectronic Engineering 2005 Vol. 82; Iss. 1

Simulation of fluid flow in the step and flash imprint lithography process

Shravanthi Reddy, Roger T. Bonnecaze
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Volume:
82
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.mee.2005.06.002
File:
PDF, 360 KB
english, 2005
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