How Pore Size and Surface Roughness Affect Diffusion Barrier Continuity on Porous Low-k Films
Sun, Jia-Ning, Hu, Yifan, Frieze, William E., Chen, Wei, Gidley, David W.Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1565140
File:
PDF, 518 KB
english, 2003