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Analysis of HSG-7000 silsesquioxane-based low-k dielectric hot plate curing using Raman spectroscopy
C. Doux, K.C. Aw, M. Niewoudt, W. GaoVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2005.10.007
File:
PDF, 176 KB
english, 2006