Microfabrication processes on cylindrical substrates – Part...

Microfabrication processes on cylindrical substrates – Part I: Material deposition and removal

Sean Snow, Stephen C. Jacobsen
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Volume:
83
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.mee.2006.06.003
File:
PDF, 438 KB
english, 2006
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