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Evaluating Chip-Level Impact of Cu/Low- $\kappa $ Performance Degradation on Circuit Performance at Future Technology Nodes
Ceyhan, Ahmet, Jung, Moongon, Panth, Shreepad, Lim, Sung Kyu, Naeemi, AzadVolume:
62
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2015.2394407
Date:
March, 2015
File:
PDF, 2.50 MB
english, 2015