Effects of additive elements on the phase formation and...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

Effects of additive elements on the phase formation and morphological stability of nickel monosilicide films

C. Lavoie, C. Detavernier, C. Cabral Jr., F.M. d’Heurle, A.J. Kellock, J. Jordan-Sweet, J.M.E. Harper
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
83
Year:
2006
Language:
english
Pages:
13
DOI:
10.1016/j.mee.2006.09.006
File:
PDF, 841 KB
english, 2006
Conversion to is in progress
Conversion to is failed