Impact of TiN post-treatment on metal insulator metal...

Microelectronic Engineering 2006 Vol. 83; Iss. 11-12

Impact of TiN post-treatment on metal insulator metal capacitor performances

A. Bajolet, J-P. Manceau, S. Bruyère, R. Clerc, M. Proust, N. Gaillard, J-C. Giraudin, P. Delpech, L. Montès, G. Ghibaudo
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Volume:
83
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2006.10.004
File:
PDF, 480 KB
english, 2006
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