In situ study of the growth kinetics and interfacial roughness during the first stages of nickel–silicide formation
L. Ehouarne, M. Putero, D. Mangelinck, F. Nemouchi, T. Bigault, E. Ziegler, R. CoppardVolume:
83
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2006.10.014
File:
PDF, 1.02 MB
english, 2006