Type of Plasmas and Microstructures of TiO[sub 2] Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition
Borrás, Ana, Cotrino, José, González-Elipe, Agustín R.Volume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2794289
File:
PDF, 496 KB
english, 2007