A mask-free method of patterned porous silicon formation by a localized electrical field
Jia-Chuan Lin, Hsi-Ting Hou, Wei-Chih TsaiVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2006.10.091
File:
PDF, 264 KB
english, 2007