3D structures for UV-NIL template fabrication with...

Microelectronic Engineering 2007 Vol. 84; Iss. 5-8

3D structures for UV-NIL template fabrication with grayscale e-beam lithography

Guido Piaszenski, Ulrich Barth, Axel Rudzinski, Andreas Rampe, Andreas Fuchs, Markus Bender, Ulrich Plachetka
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.015
File:
PDF, 743 KB
english, 2007
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