Improvement of model kernel representation in process simulation by taking pattern correlation into account
Jianliang Li, Qiliang Yan, Abani Biswas, Lawrence S. Melvin IIIVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.031
File:
PDF, 279 KB
english, 2007