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Embedded nano channels fabricated by non-selective reverse contact UV nanoimprint lithography technique
N. Kehagias, G. Chansin, V. Reboud, M. Zelsmann, C. Schuster, M. Kubenz, F. Reuther, G. Gruetzner, C.M. Sotomayor TorresVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.057
File:
PDF, 406 KB
english, 2007