Parasitic effect on silicon MEMS resonator model parameters
Kazuaki Tanaka, Ryuji Kihara, Ana Sánchez-Amores, Josep Montserrat, Jaume EsteveVolume:
84
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.01.209
File:
PDF, 328 KB
english, 2007