Mode shape imaging of out-of-plane and in-plane vibrating...

Microelectronic Engineering 2007 Vol. 84; Iss. 5-8

Mode shape imaging of out-of-plane and in-plane vibrating RF micromechanical resonators by atomic force microscopy

Alvaro San Paulo, Emmanuel Quevy, Justin Black, Roger T. Howe, Richard White, Jeffrey Bokor
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.01.223
File:
PDF, 443 KB
english, 2007
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