Integrated monitoring of ULK dielectrics out-gassing and...

Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique

R. Delsol, L. Chapelon, H. Chaabouni, L. Broussous, M. Schellenberger, A. Ostrovski, P. Normandon
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Volume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.05.020
File:
PDF, 205 KB
english, 2007
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