Integrated monitoring of ULK dielectrics out-gassing and measurement of pore sealing efficiency by residual gas analysis technique
R. Delsol, L. Chapelon, H. Chaabouni, L. Broussous, M. Schellenberger, A. Ostrovski, P. NormandonVolume:
84
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2007.05.020
File:
PDF, 205 KB
english, 2007