Materials characterization of WNxCy, WNx and WCx films for advanced barriers
H. Volders, Z. Tökei, H. Bender, B. Brijs, R. Caluwaerts, L. Carbonell, T. Conard, C. Drijbooms, A. Franquet, S. Garaud, I. Hoflijk, A. Moussa, F. Sinapi, Y. Travaly, D. Vanhaeren, G. Vereecke, C. ZhaVolume:
84
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.05.023
File:
PDF, 621 KB
english, 2007