Impact of porous SiOCH on propagation performance measured for narrow interconnects of the 45 nm node
M. Gallitre, B. Blampey, B. Fléchet, A. Farcy, V. Arnal, C. Bermond, T. Lacrevaz, J. TorresVolume:
84
Year:
2007
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.05.034
File:
PDF, 1005 KB
english, 2007