An investigation of ultra low-k dielectrics with high thermal stability for integration in memory devices
E. Hong, S. Demuynck, Q.T. Le, M. Baklanov, L. Carbonell, M. Van Hove, H. MeynenVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.040
File:
PDF, 501 KB
english, 2007