Thermal stability of NiPt- and Pt-silicide contacts on SiGe source/drain
C. Demeurisse, P. Verheyen, K. Opsomer, C. Vrancken, P. Absil, A. LauwersVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.065
File:
PDF, 445 KB
english, 2007