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NiSi contact metallization using electroless Ni deposition on Pd-activated self-assembled monolayer (SAM) on p-type Si(1 0 0)
A. Duhin, Y. Sverdlov, I. Torchinsky, Yishay Feldman, Y. Shacham-DiamandVolume:
84
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.05.067
File:
PDF, 603 KB
english, 2007