Effects of a magnetic field on the copper metallization using the electroplating process
Byung-Nam Park, Young-Soo Sohn, Sie-Young ChoiVolume:
85
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2007.06.018
File:
PDF, 1.85 MB
english, 2008