Study and formation of 2D microstructures of sapphire by...

Microelectronic Engineering 2008 Vol. 85; Iss. 3

Study and formation of 2D microstructures of sapphire by focused ion beam milling

Tao Dai, Xiangning Kang, Bei Zhang, Jun Xu, Kui Bao, Chang Xiong, Zizhao Gan
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Volume:
85
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2007.11.009
File:
PDF, 475 KB
english, 2008
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