Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)
J. Kettle, R.T. Hoyle, S. Dimov, R.M. PerksVolume:
85
Year:
2008
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2007.12.003
File:
PDF, 422 KB
english, 2008