Three-dimensional projection mask-less patterning (PMLP) of...

Microelectronic Engineering 2008 Vol. 85; Iss. 5-6

Three-dimensional projection mask-less patterning (PMLP) of micro-lenses and cones: Monitoring and modelling of ion multi-beam kinetic sputtering in GaAs

Falco C.M.J.M. van Delft, Christoph Ebm, Emile P. Naburgh, Elmar Platzgummer, Hans Loeschner, Gerhard Gross
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Volume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2007.12.021
File:
PDF, 1.29 MB
english, 2008
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