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Imprintability of polymers for thermal nanoimprint
H.-C. Scheer, N. Bogdanski, M. Wissen, S. MöllenbeckVolume:
85
Year:
2008
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2007.12.025
File:
PDF, 459 KB
english, 2008