![](/img/cover-not-exists.png)
Influence of slurry components on uniformity in copper chemical mechanical planarization
Hyunseop Lee, Boumyoung Park, Haedo JeongVolume:
85
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.mee.2007.12.044
File:
PDF, 841 KB
english, 2008