Nanofabrication of SiC templates for direct hot embossing...

Microelectronic Engineering 2008 Vol. 85; Iss. 5-6

Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials

Yifang Chen, Yun Zhou, Genhua Pan, Ejaz Huq, Bing-Rui Lu, Shen-Qi Xie, Jing Wan, Zhen Shu, Xin-Ping Qu, Ran Liu, S. Banu, S. Birtwell, Liudi Jiang
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Volume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.01.002
File:
PDF, 681 KB
english, 2008
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