Micro lens imprinted on Pyrex glass by using amorphous Ni–P...

Microelectronic Engineering 2008 Vol. 85; Iss. 5-6

Micro lens imprinted on Pyrex glass by using amorphous Ni–P alloy mold

Harutaka Mekaru, Tomoyuki Tsuchida, Jun-ichi Uegaki, Manabu Yasui, Michiru Yamashita, Masaharu Takahashi
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Volume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.01.031
File:
PDF, 701 KB
english, 2008
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