Flare mitigation strategies in extreme ultraviolet...

Microelectronic Engineering 2008 Vol. 85; Iss. 5-6

Flare mitigation strategies in extreme ultraviolet lithography

Insung Kim, Alan Myers, Lawrence S. Melvin III, Brian Ward, Gian Francesco Lorusso, Rik Jonckheere, Anne-Marie Goethals, Kurt Ronse
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Volume:
85
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2008.01.098
File:
PDF, 911 KB
english, 2008
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