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Improved bi-layer lift-off process for MEMS applications
Jinxing Liang, Fusao Kohsaka, Takahiro Matsuo, Xuefeng Li, Toshitsugu UedaVolume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.01.104
File:
PDF, 448 KB
english, 2008