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Analysis of the filling behaviour of trenches via air bubble tracking
S. Möllenbeck, N. Bogdanski, M. Wissen, H.-C. Scheer, J. Zajadacz, K. ZimmerVolume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.02.006
File:
PDF, 599 KB
english, 2008