Effect of wet chemical substrate pretreatment on the growth...

Microelectronic Engineering 2008 Vol. 85; Iss. 10

Effect of wet chemical substrate pretreatment on the growth behavior of Ta(N) films deposited by thermal ALD

S. Strehle, H. Schumacher, D. Schmidt, M. Knaut, M. Albert, J.W. Bartha
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Volume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.04.020
File:
PDF, 455 KB
english, 2008
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