Air gap formation by UV-assisted decomposition of CVD...

Microelectronic Engineering 2008 Vol. 85; Iss. 10

Air gap formation by UV-assisted decomposition of CVD material

M. Pantouvaki, A. Humbert, E. VanBesien, E. Camerotto, Y. Travaly, O. Richard, M. Willegems, H. Volders, K. Kellens, R. Daamen, R.J.O.M. Hoofman, G. Beyer
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Volume:
85
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.05.020
File:
PDF, 687 KB
english, 2008
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