An optical study of alumina films thermal evolution upon...

Microelectronic Engineering 2008 Vol. 85; Iss. 12

An optical study of alumina films thermal evolution upon ammonia annealing

Enrico Bellandi, Annalisa Del Vitto, Angelo Claudio Nale, Rossella Piagge, Massimo Caniatti, Mauro Alessandri
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Volume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.09.010
File:
PDF, 289 KB
english, 2008
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