Vertically stacked non-volatile memory devices – material...

Microelectronic Engineering 2008 Vol. 85; Iss. 12

Vertically stacked non-volatile memory devices – material considerations

M. Godlewski, E. Guziewicz, J. Szade, A. Wójcik-Głodowska, Ł. Wachnicki, T. Krajewski, K. Kopalko, R. Jakieła, S. Yatsunenko, E. Przeździecka, P. Kruszewski, N. Huby, G. Tallarida, S. Ferrari
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Volume:
85
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.09.012
File:
PDF, 227 KB
english, 2008
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