Adhesion force change on multilayer EUVL mask due to laser...

Microelectronic Engineering 2009 Vol. 86; Iss. 2

Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave

Tae-Gon Kim, Young-Sam Yoo, Jinho Ahn, Jong-Myoung Lee, Jae-Sung Choi, Ahmed A. Busnaina, Jin-Goo Park
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.10.016
File:
PDF, 590 KB
english, 2009
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