3D replication using PDMS mold for microcoil

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

3D replication using PDMS mold for microcoil

Dongkeon Lee, Harutaka Mekaru, Hiroshi Hiroshima, Sohei Matsumoto, Toshihiro Itoh, Masaharu Takahashi, Ryutaro Maeda
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.11.011
File:
PDF, 480 KB
english, 2009
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