Integration of a technique for the deposition of...

Integration of a technique for the deposition of nanostructured films with MEMS-based microfabrication technologies: Application to micro gas sensors

Massimiliano Decarli, L. Lorenzelli, V. Guarnieri, E. Barborini, S. Vinati, C. Ducati, P. Milani
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.11.036
File:
PDF, 296 KB
english, 2009
Conversion to is in progress
Conversion to is failed