Integration of a technique for the deposition of nanostructured films with MEMS-based microfabrication technologies: Application to micro gas sensors
Massimiliano Decarli, L. Lorenzelli, V. Guarnieri, E. Barborini, S. Vinati, C. Ducati, P. MilaniVolume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.11.036
File:
PDF, 296 KB
english, 2009