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Resolving sub-nm steps with a low-voltage miniature scanning electron microscope
Lawrence Muray, James Spallas, Charles Silver, Scott Indermuehle, Nicola Ferralis, Carlo Carraro, Roya MaboudianVolume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.11.065
File:
PDF, 1.08 MB
english, 2009