![](/img/cover-not-exists.png)
Rigorous diffraction simulations of topographic wafer stacks in double patterning
Feng Shao, Peter Evanschitzky, Tim Fühner, Andreas ErdmannVolume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.11.078
File:
PDF, 320 KB
english, 2009